Nanoimprint Lithography
Technology fields responsible for the manufacture of semiconductor chips over half a century are about to be joined by an innovative technology. Canon is leading the world in working toward the mass implementation of nanoimprint lithography, utilizing technologies that it has developed through its semiconductor lithography equipment business, including a wafer stage that moves wafers accurately and at high speed, as well as high-precision alignment.
Більш детально можна ознайомитися з офіційним прес-релізом за посиланням